JPH03119940U - - Google Patents
Info
- Publication number
- JPH03119940U JPH03119940U JP2920090U JP2920090U JPH03119940U JP H03119940 U JPH03119940 U JP H03119940U JP 2920090 U JP2920090 U JP 2920090U JP 2920090 U JP2920090 U JP 2920090U JP H03119940 U JPH03119940 U JP H03119940U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- plasma generation
- generation container
- ion source
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2920090U JPH03119940U (en]) | 1990-03-22 | 1990-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2920090U JPH03119940U (en]) | 1990-03-22 | 1990-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03119940U true JPH03119940U (en]) | 1991-12-10 |
Family
ID=31531973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2920090U Pending JPH03119940U (en]) | 1990-03-22 | 1990-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03119940U (en]) |
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1990
- 1990-03-22 JP JP2920090U patent/JPH03119940U/ja active Pending